The Forum of Precision Testing Technology for Integrated Circuit

Time：March 19, 2026

Venue：Conference Hall, Inner Plaza next to Hall E7, Shanghai New International Expo Centre (SNIEC)

Fee：Free

language：Chinese

 

Organizers：

Committee for Optical Test and Measurement of Chinese Optics Society (COS-COTM)

Messe München

 

Co-Organizers：

Nanjing University of Science and Technology

MIIT Key Laboratory of Advanced Solid Laser

Analytical Instrument Branch of China Instrument and Control Society

Messe Muenchen Shanghai Co., Ltd.

 

Chairmans：

Prof. Hua Shen, Nanjing University of Science and Technology

 

Co-Chairmans：

Weihu Zhou, Researcher, The Institute of Microelectronics  of the Chinese Academy of Sciences 

Prof. Shiyuan Liu, Huazhong University of Science and Technology

Prof. Yidong Tan, Tsinghua University

 

Topics：

Wafer inspection, lithography process inspection, packaging inspection, lithography lens inspection, etc.

 

Agenda：

Pending……

 

Short Bio and Abstract：

Pending……